Features
Designed as a stand-alone horizontal wafer transfer system, the HWTS-300 provides
maximum carrier interface flexibility for pilot lines, labs and anywhere 300mm
wafers are transferred to or from multiple FOUPs or open cassettes. By using
Fortrend proven modules, the Golden Gate 300 can safely and quickly transfer
wafers into the required carriers.
| Options |
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| Specifications | |
| Size (W-D-H) | 83.6 x 74.6 x 69.1 inches* (W x D x H) (2123 x 1895 x 1755 mm) |
| Throughput: | <500 wafers per hour* |
| Power | |
| Electrical: | 110 VAC/ 20A or 220 VAC/ 10A, single phase, 50/60 Hz |
| Air: | 95 psi / 0.5 cfm or 29? Hg Vacuum / 0.5 cfm (vacuum end effector only) |
| Environment: | < Class 1 |
*Based on configuration shown