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產品介紹
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i-Cell Reticle Pod 儲存系統 |
首頁＞產品＞
光罩儲存及存取系統
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i-Cell Reticle Pod 儲存系統 |
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Single RSP stocker for daily production reticle storage and management requirements
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Dual-carousel configuration for 256 single RSP pods or Quad carousel configuration for 512 pods.
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Small footprint that can easily fit into any existing bay layout
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Integrated RFID systems for optimal reticle management and logistical controls
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