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Lamina-II series EFEM/Sorter |
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- Fully automated reticle transfer systems
- Better than ISO Class 2 cleanliness
- SEMI E78 ESD “Level 1” standard
- Load port options: 150mm and 200mm RSP, ASML, Nikon, Cannon, HOYA, Toppan, DNP, TMC, ShinEtsu, DMS, and more
- Other options: BCR/OCR reader, IR, RFID reader/writer, Turntable, SECS/GEM Interface
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