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Wafer baking oven system SIO-300-200 Series Home＞Products＞ Wafer Cure Oven System 
 
Wafer Baking Oven System SIO-300-200-2
  • The Oven system has integrated mini-enviroment, 30 0mm load ports, wafer robot, cassette robot, YES series oven and control unit
  • 200mm cassette manual/auto load available 

                      

  • Full automatic
  • Temperature Range: Ambient~160 degree
  • Uniformity: ± 5 degree  
  • Cleanness of System: Class 1
  • Cleanness of Oven: Class 10
  • N2 bake oven
  • N2 comsumption:  ≈ 10L/min
  • Number of Recipe: Programmable

                                                                    

  • Key parameter monitor in real time
  • Wafer bumping interlock 
  • Wafer and Robotic arm protrusion detection
  • Main controller: IPC 
  • Hard Disk Security: Riad 5
  • OS: Win XP professional
  • Modular design minimizes adjustments, maintenance and downtime
  • SECSI/SECSII
 
 
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