200mm SMIF Pod Opener with Integrated Cassette Transfer Robots
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200mm Wafer SMIF Product Portfolio
PLUS-500-SD-X
Designed for tools with narrow windows AND height limitation of Chamber
The minimum width of window opening down to 240mm and Clearance height of chamber down to 280mm, PLUS-500-SD-S can load/unload cassette onto Tool's chamber
Reduce the cost and time of tool chamber modifications
