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200mm Table Top Stand-alone SMIF Pod Openers for OEM Applications Home>Products> 200mm Wafer SMIF  
 
PLM-200 SMIF Pod Opener for OEM Application

 

  • Fortrend PLM-200 is a simple, reliable pod opener designed to open 200mm SMIF pods by lifting the shell. 
  • Wafer or Reticles remain in a sealed micro-environment where they can be accessed by a process tool’s robot. Active airflow keeps the sealed micro-environment in better than class-1 cleanliness.
  • Designed for quick installation and removal the PLM interfaces easily with most semiconductor tools.
  • An optional reticle mapper protects against breakage during reticle handling operations.
  • An integrated wafer/reticle protrusion sensor and provisions for tool interlock signals further prevent the pod cover from closing on protruding wafers/Reticles. 
  • Active pod present sensor and pod base/cover sticktion detection algorithm detect the presence of the SMIF pod and faulty SMIF pods prevent mistaken pod operations assures optimal performance of the tools

 
 
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