Fortrend PLM-200 is a simple, reliable pod opener designed to open 200mm SMIF pods by lifting the shell. It's easy to integrate with EFEM or tools.
Wafer or Reticles remain in a sealed micro-environment where they can be accessed by a process tool’s robot. Active airflow keeps the sealed micro-environment in better than class-1 cleanliness.
Designed for quick installation and removal the PLM interfaces easily with most semiconductor tools.
An optional reticle mapper protects against breakage during reticle handling operations.
An integrated wafer/reticle protrusion sensor and provisions for tool interlock signals further prevent the pod cover from closing on protruding wafers/Reticles.
Active pod present sensor and pod base/cover sticktion detection algorithm detect the presence of the SMIF pod and faulty SMIF pods prevent mistaken pod operations assures optimal performance of the tools