200mm Table Top Stand-alone SMIF Pod Openers for OEM Applications
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200mm Wafer SMIF Product Portfolio
POM-200 / POS-200 Table Top Stand-alone SMIF Pod Opener
Fortrend POM-200/POS-200 is a simple, reliable pod opener designed to open 200mm SMIF pods by lifting the shell. After Pod Shell lift, operation can move entire cassette out or pick wafer out by gripper.
Untra compact design and can almost be placed on any table.
An optional wafer mapper allows additional functionalities as required by special application.
An integrated wafer/reticle protrusion sensor and provisions for tool interlock signals further prevent the pod cover from closing on protruding wafers/Reticles.
Active pod present sensor and pod base/cover sticktion detection algorithm detect the presence of the SMIF pod and faulty SMIF pods prevent mistaken pod operations assures optimal performance of the tools
