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Fortrend - Wafer Transfer Systems

The Fortrend Wafer Transfer Systems are fully automated and reliable. The systems design reduces contamination and increases yield while increasing throughput by transferring wafer lots. The small footprint makes them ideal for those areas where equipment space is limited. Our precise engineering and manufacturing produces a product for the Class 1 cleanroom and sub-micron geometries and serves all fab requirements including wet stations, robotics and CMP applications or anywhere wafers are placed into process carriers. These systems can be integrated into process equipment for high throughput or used as stand alone equipment.

Systems Configurations
  • F-X025 Single stage WTS - 25 wafers
  • F-X225 Two-stage WTS - 25 wafer
  • F-X350 Three stage WTS - 25/50 wafers or 12/13 split
  • E-8425 Four stage WTS - 50 wafer
  • E-X025 BB Single stage WTS -25 wafers, reverse selected wafers
  • E-X225 BB Two-stage WTS - 25 wafers, reverse selected wafers
  • E-X225 PBB Two-stage WTS - proximity back-to-back transfer
  • E-300 Dual or Four-stage WTS for 300mm wafer - 13, 25 or 50 wafers
Options: notchfinder, flatfinder, high temperatureVespel, footswitch

 

 




 

 

 




Fortrend Corporation
610 North Mary Ave
Sunnyvale, CA 94085
Phone: (408) 734-9311
Fax: (408) 734-4299