ico408-734-9311
HOME
PRODUCTS
SMIF Reticle Automation SORTER/EFEM STOCKER AMR Core Components
SERVICES
Feedback
ABOUT
Profile Development Contact
ENGLISH
SORTER/EFEM
Location： Home > Products > SORTER/EFEM
SORTER/EFEM
Lamina 206
Fortrend offers a range of EUV & 193 Reticle handling automation solutions to meet the evolving cleanliness standard’s demanded by today’s industry.
The Lamina 200 Series Sorter system offer solutions from transferring the Reticles from storage and shipping boxes to SMIF pods both in the Mask houses and FAB floors. The systems are built in a modular design to suit customer requirements. The transfer of Reticles is inside a ISO class 1 Mini-environment.
Consultation
Introduction
Specification
Other products
QC tool designed for mask house
ISO Class 1 cleanliness
Support Reticle SMIF POD, shipping and storage box
Modular Design
Vision system: Bright light Inspection Station (BLIS)
Read station (Barcode,OCR, ID)
Reticle Scara Robot and Turn-Flip Robot

 
Product recommendation
PLM 150Rx
PLM 200Rx
PLM EUV Dual
PLUS 150 G4
PLUS 500 G4
POM 150R
POM 200R
Lamina 202
PLUS 150S-X/PLUS 500S-X
Lamina 203
PLUS 150CR-R/PLUS 500CR-R
Lamina 204
Lamina 206
PLUS 150CL-L/PLUS 500CL-L
PLUS 150R-X/PLUS 500R-X
Lamina 205
PLUS 150SD-X/PLUS 500SD-X
Dual Arms Scara Robot
300mm Lord Port
Turn Flip Robot
PLUS 150UX/PLUS 500UX
Lamina Series 150mm Sorter
2-3 Step Telescopic Robot
Lamina Series 200mm Sorter
Pre-Aligner
200mm-300mm AMR
PLM 200W
Single Arm Scara Robot
Lamina Series 300mm Sorter
200mm-300mm Stocker
Flip Pre-Aligner
PLUS 500F