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PLUS 500F
Small footprint saves valuable FAB floor space
ISO Class 2 or better cleanliness with active self-clean air flow design.
Lifts the Pod shell leaving the Wafer Cassette in a sealed mini-environment
Robot Arm loads Cassette to A400 3 level internal Carousal
Drop in Replacement for existing A400 SMIF
ASM Approved SMIF Option
All electrical system with field programmable application software
Introduction
Specification
Other products
  • Wafer Cassette Present Sensor
  • Wafer Protrusion Sensor
  • Pod Present Sensor
  • Wafer Mapping Sensor (Present, Cross Slot)
  • SEMI E19.4, S2 and S8 standards and CE certified
  • Mounts directly to existing ASM SMIF Mount
  • Teach Pendant
  • Optional Universal Floor Mount.
  • Optional RFID reader/writer

POD/Wafer Size

200 mm

 

Dimensions

Width

500 mm body (710 mm Wheel Base)

Depth

674 mm

Height

1770 mm

Robot arm payload

8 kg

Pod Interface

SEMI E19.4

Cleanliness

ISO Class 2 or better

Power requirement

100-240VAC @10 AMPS, 50/60 Hz

Weight

185 Kg

Load height

764 to 1234mm

Load Reach

250mm

Load Repeatability

± 0.05 mm

Mounting repeatability

± 0.25mm

Throughput

<100 Seconds Load

<100 Seconds Unload

Noise level

< 75 dBA

Pendant

0.3 kg, LCD display, 40 keys, RJ-11 connector

Communication

EIA-RS232C, SECS I/II

Parallel I/O, SEMI E23-96, IEEE-TTL

Lot ID reader option

RFID and/or IR Link, SMART TAG

External EMO

Yes

Working Temperature

0 ~ 40ºC

Working Humidity

5% ~ 90%, Non-condensing

Inquiry
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