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Reticle Automation

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PLM 200Rx

Small footprint saves valuable FAB floor space; ISO Class 1 cleanliness with active self-clean air flow design; Opens Standard E100 RSP and EUV E152 Outer Pods Door; Lifts the Pod shell leaving the Reticles in a sealed mini environment; Applies 80N Force to E152 Pod doors during opening and Closing; Info Pad Sensor to detect Pod Type; All electrical system with field programmable application software; OHT Compatible;

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Small footprint saves valuable FAB floor space
ISO Class 1 cleanliness with active self-clean air flow design.
Opens Standard E100 RSP and EUV E152 Outer Pods Door
Lifts the Pod shell leaving the Reticles in a sealed mini environment
Applies 80N Force to E152 Pod doors during opening and Closing.
Info Pad Sensor to detect Pod Type
All electrical system with field programmable application software
OHT Compatible
Reticle Present Sensor (E100 SMIF Pods)
Inner Pod Present Sensor (E152 EUV SMIF Pods)
Pellicle Present and Orientation sensor (for E100 SMIF Pods)
Meets SEMI E19.4, E100, E152, E117, S2 and S8 standards and CE certified
Mounts directly into a process Tool or to a manual load port adaptor to convert open station to a SMIF compatible station.
Optional RFID reader/writer

Specifications:
Reticle size	150mm W x 150mm D x 6.35mm H
Dimension	467W x 460D x 770H mm
Elevator Stroke	210 mm
Load capacity	5.4kg
Pod Types	SEMI E100 Single RSP SEMI E152 EUV SMIF Pod
Pod interface	SEMI E19.4
Power requirement	100V/240VAC @ 1Amp 50/60Hz Or 24 VDC (Option)
Weight	23kg without Pod
Open Pod	< 12 seconds
Close Pod	< 10 seconds
MCBF	50,000 cycles
MTTR	< 1 hour
Communication	Parallel and/or Serial
Communication	EIA-RS232C(SECS I/II)