ico408-734-9311
2-3 Step Telescopic Robot
Introduction
Specification
Other products

Features:

Maximum 1,200mm vertical stroke(Z-stroke)
Transfer 50-450mm Wafer(2~18’’)
Up to 3-step telescopictype application
Single & Dual arm Robot
ODM or OEM Supply
Single & Dual arm/Multi Blade Type
0.1 micron meter CLASS 1 Cleanliness
Various End-Effector: Vacuum Blade, Edge Gripper
Linear Track, Mapping Sensor (Optional)
Customization available when requested

MODEL

Tele Single

(2-step)

Tele Dual

(2-step)

Tele Single

(3-step)

Tele Dual

(3-step)

ASR-**10-20

ASR-**20-20

ASR-**10-30

ASR-3**20-30

Performance

Motion      

Range

R1,R2 axis (Extension)

567mm

567mm

730mm

730mm

 T axis (Rotation)

370deg

370deg

370deg 

370deg

Z axis (Up/down)

600mm 

600mm

1200mm 

1200mm

MAX.      

Speed

R1,R2 axis (Extension)

800 mm/sec 

800 mm/sec

 800 mm/sec

800 mm/sec

 T axis (Rotation)

 240 deg/sec

240 deg/sec

240 deg/sec 

240 deg/sec

Z axis (Up/down)

 600 mm/sec

600 mm/sec

600 mm/sec 

600 mm/sec

Repeat-ability

R1,R2 axis (Extension)

≤ ±0.1mm 

≤ ±0.1mm 

≤ ±0.1mm 

≤ ±0.1mm

 T axis (Rotation)

 ≤ ±0.02deg 

 ≤ ±0.02deg

 ≤ ±0.02deg 

 ≤ ±0.02deg

Z axis (Up/down)

≤ ±0.1mm 

≤ ±0.1mm 

≤ ±0.1mm 

≤ ±0.1mm

MTBF

≥  8000 hrs 

MTTR

≤  2 hrs  

General

Wafer Size

8 -12 inch

Control Axis

4

5

5

6

Arm Type

Single Arm 

Dual Arm

Single Arm 

Dual Arm

Blade Thinkness

< 3mm

Cleanliness

Class 1

Load Capacity

1kg(Include Gripper) 

Weight

60 kg

64 kg

80 kg

84 kg

Cable Length                                              (Robot-Controller)

3m(Standard)

Utility

Power(Controller)

Signle Phase AC220±10%, 50/60Hz

Air

More than 0.4-0.5MPa,¢ 4mm

Vacuum

Less than -50kPa 

Environment

Operating Temp

0-40°C