MASK EFEM-FORTREND

Automated photomask transportation/sorting system

Can be used with photomask - related equipment (MASK EFEM) or as a standalone sorting device (MASK sorter)

Enables full - automatic carrier replacement and conversion between various transport boxes (like Hoya, ShinEtsu, Nikon, Canno, etc.) and RSP illumination boxes (RSP150/RSP200/RSP EUV)

The customized robot arm, equipped with a photomask - specific end - of - arm tooling, meets complex application scenarios, including reticle, mask, and pellicle.

With 45 years of semiconductor industry experience and validation, it complies with the SECS/GEM standard communication protocol for semiconductor factories.

Modular design for easy and quick installation and maintenance.

Many safety and anti - misoperation designs ensure normal equipment operation.

Services include installation, onsite training, global support, and various cost - effective long - term maintenance contracts.

Product Specifications

Rated Voltage	Phase AC 220V 50/60 Hz
Rated Power	3.52kW(Decide by config)
Comm Interface	RJ45
Comm protocol	ASCI/HEX/HSMS&SECS Ⅱ
Software	Fortrend independently developed software
Cleanliness	ISO 14644-1 class 1 / ISO class 3
Uptime	≥99%
MTBF	≥4000 hours
MTTR	≤4 hours
MTBA	>100 hours
MTTA	<10 hours
MCBF	100,000Wafers
Wafer Breakage Rate	≤1/1,000,000
OCR Accuracy Rate for Bare Wafers	≥99.9%
Repeatability of Positioning Accuracy	士0.1mm

Disclaimer: The appearance, specifications, performance descriptions, comparative data, and other information regarding the products displayed on this website are based on internal testing and experiments conducted in FORTREND’s laboratory. This information is for reference purposes only, and the final product may vary.

408-734-9311 sales@fortrend.com

2220 O’Toole Avenue, San Jose, CA 95131

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