● Fully Automatically Operation with 2 or 4 FOUP opener

● Friendly GUI operating interface

● Multi recipes and CIM control

● Data collection to record process variables such as temperature, pressure, gas flow,..for real time control

● Reliable dual arm robot for wafer transfer

● Transfer environmental cleanness: better than class 10

● Oven Chamber cleanness: class10

● Capacity of 50 wafers per chamber, two chambers: 100 wafer

● Scroll Pump assembly, dry, lubricant-free, vacuum pump