· Fully Automatically Operation with 2 or 4 FOUP opener
· Friendly GUI operating interface
· Multi recipes and CIM control
· Data collection to record process variables such as temperature, pressure, gas flow,..for real time control
· Reliable dual arm robot for wafer transfer
· Transfer environmental cleanness: better than class 10
· Oven Chamber cleanness: class10
· Capacity of 50 wafers per chamber , two chambers:100 wafer
· Scroll Pump assembly, dry, lubricant-free, vacuum pump