This robot arm is suitable for wafer transportation in waterproof environments, and can be equipped with vacuum suction or edge-grip mechanisms. The protection rating is IP64, which means it is dust-tight and protected against water splashing from any direction. It can handle wafers in acidic, alkaline, and cleaning environments. It is designed for high-speed transportation of semiconductor wafers in waterproof environments and is suitable for various semiconductor equipment related to wet processes, such as EFEMs and sorters. The lifting and horizontal movement strokes of the cleaning process equipment need to be customized according to space requirements.