LOW TEMPERATURE EQUIPMENT-FORTREND

SIO-300-200

● The Oven system has integrated mini-environment, 300mm load ports, wafer robot, cassette robot, and oven and control unit.

● Field proven application: 3DIC baking, photo-resist baking, moist removal, reflow and thermal process.

● 200mm cassette manual/auto load available.

● Wide operating range: ambient ~ 250 degrees.

● Full automatic.

● Friendly operational interface.

● Class 10 for Baking Chamber.

SIO-300-200

● Better Class 10 for Oven System

● Process Gas Input: N2, up to 3 gases

● Nitrogen Consumption: 10L/min

● Temperature Uniformity: ± 3.5℃

● Number of Recipe: Programmable

● Wafer bumping interlock

● Wafer and robotic arm protrusion detection

● Main controller: IPC

● OS: Windows XP professional

● Modular design minimizes adjustments, maintenance and downtime

● S2, S8 compliant

Disclaimer: The appearance, specifications, performance descriptions, comparative data, and other information regarding the products displayed on this website are based on internal testing and experiments conducted in FORTREND’s laboratory. This information is for reference purposes only, and the final product may vary.

408-734-9311 sales@fortrend.com

2220 O’Toole Avenue, San Jose, CA 95131

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