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Semiconductor Vacuum Transfer Systems (VTM) enable automated, high-precision wafer transfer in high-vacuum environments, minimizing contamination and enhancing production efficiency and yield.


FORTREND vacuum transfer systems are compatible with most front - end semiconductor processes. All mass production equipment meet SEMI standards and can adapt to various semiconductor and general semiconductor material process equipment requirements, including wafers and masks.


Standard solutions are available for process equipment integration. Customization is also offered based on customer needs, with mature hardware and software options to satisfy different process and operational requirements.


Core components of the vacuum transfer systems are independently designed and developed by FORTREND. They are assembled in - house, ensuring better lead times and performance.

300mm wafers (including TAIKO, Framed wafers), photomasks, and general semiconductor materials (e.g., photovoltaic silicon wafers).


Semiconductor front - end and general semiconductor process equipment such as PVD, CVD, ALD, etc.


High - purity transfer with wafer transfer cleanliness of Class1.


High - efficiency and high - stability transfer: transfer efficiency>200 pcs/h; Up time:>98%.


Supports domestic substitution and customer - customized solutions.

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Disclaimer: The appearance, specifications, performance descriptions, comparative data, and other information regarding the products displayed on this website are based on internal testing and experiments conducted in FORTREND’s laboratory. This information is for reference purposes only, and the final product may vary.

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408-734-9311sales@fortrend.com

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