This FORTREND front - end automation module for ion - implantation process equipment docking comes with a wafer box storage function, can be connected to overhead cranes or accept manual loading, and is configured with FOUP storage positions and a FOUP Robot.

It has a dual - Robot wafer - passing function to improve transfer efficiency and output.

A 1+5 Robot configuration is available, enabling the handling of five wafers simultaneously.

Its internal cleanliness can reach up to ISO Class 1.

It is compatible with all FOUP, FOSB, SMIF POD and Cassette that meet SEMI standards.

It has outstanding COO and COC, helping customers reduce costs and improve efficiency.

It also has customization capabilities and can be designed according to customer requirements.

Modular design for easy and quick installation and maintenance.

Many safety and anti - misoperation designs ensure normal equipment operation.

Services include installation, onsite training, global support, and various cost - effective long - term maintenance contracts.