EFEM（INTERFACE WITH MEASUREMENT PROCESS）-FORTREND

This FORTREND docking metrology process equipment front - end automation module is equipped with high - precision edge finders and readers, among other key components.

It features air knives, wet - processing robots and drying modules to dry, cool and clean the surface of wafers.

It is widely used in metrology, AOI, CDSEM and other equipment, and is connected to immersion - type metrology processes.

It can accommodate wafers of various sizes (3 - to 12 - inch) and types, with thickness support ranging from 100μm to 1,600μm.

Its internal cleanliness can reach up to ISO Class 1.

It is compatible with all FOUP, FOSB, SMIF POD and Cassette that meet SEMI standards.

It has outstanding COO and COC, helping customers reduce costs and improve efficiency.

It also has customization capabilities and can be designed according to customer requirements.

With 45 years of semiconductor industry experience and validation, it complies with the SECS/GEM standard communication protocol for semiconductor factories.

Modular design for easy and quick installation and maintenance.

Many safety and anti - misoperation designs ensure normal equipment operation.

Services include installation, onsite training, global support, and various cost - effective long - term maintenance contracts.

CUSTOMIZED PLAN

OPTIONAL SPECIAL MODULE			OPTIONAL LOADING PORT MODULE
ALIGNMENT MECHANISM, WAFER ALIGNER		TALLER LAYER OPTIONAL EQUIPMENT	300mm LoadPort
					-
ALIGNMENT MECHANISM	WAFER ALIGNER		300mm LoadPort	Frame LoadPort
FLIP MECHANISM, COOLING BUFFER			100mm/150mm/200mm LoadPort

FLIP MECHANISM	COOLING BUFFER	100-500mm	SMIF POD	Open Cassette Stage	Adaptor

OPTIONAL ROBOT MODULE
THREE-AXIS ROBOTIC ARM			FOUR-AXIS AND TWO ARMS ROBOTIC ARMS

Vacuum single-arm robotic arm	Bernoulli single-arm robotic arm	Edge clip-holding / clamping supporting robotic arm	Vacuum adsorbing arms robot	Contact-type Bernoluli-type arms robot	Edge clamping / clamping drag-lifing arms robot
FOUR-AXIS SINGLE-ARM ROBOTIC ARM		FIVE-AXIS AND TWO ARMS ROBOTIC ARMS		SELECT THE TRACK AXIS FOR 2–4 LOADPORT PASSAGE, COOPERATING WITH THE ROBOT

Vacuum adsorbing arms robot	Contact-type Bernoulli FLlP single-arm robot	Vacuum adsorbing arms FLIP robot	Contact-type Berunley-type arms FLIP robot	Drilleration diagram	Signate track schematic diagram
FORK SERIES
Vacuum Fork-Y type	Vacuum Fork-One font	Non-Contact Bernoulli	Contact Bernoulli	Clamp Type (Optional on 6/8/12)	Clamp Type Fork

PRODUCT DEMONSTRATION VIDEO

Product Specifications

Rated Voltage	Phase AC 220V 50/60 Hz
Rated Power	3.52kW(Decide by config)
Comm Interface	RJ45
Comm protocol	ASCI/HEX/HSMS&SECS Ⅱ
Software	Fortrend independently developed software
Cleanliness	ISO 14644-1 class 1 / ISO class 3
Uptime	≥99%
MTBF	≥4000 hours
MTTR	≤4 hours
MTBA	>100 hours
MTTA	<10 hours
MCBF	100,000Wafers
Wafer Breakage Rate	≤1/1,000,000
OCR Accuracy Rate for Bare Wafers	≥99.9%
Repeatability of Positioning Accuracy	士0.1mm

Disclaimer: The appearance, specifications, performance descriptions, comparative data, and other information regarding the products displayed on this website are based on internal testing and experiments conducted in FORTREND’s laboratory. This information is for reference purposes only, and the final product may vary.

408-734-9311 sales@fortrend.com

2220 O’Toole Avenue, San Jose, CA 95131

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OPTIONAL SPECIAL MODULE

OPTIONAL LOADING PORT MODULE

ALIGNMENT MECHANISM, WAFER ALIGNER

TALLER LAYER OPTIONAL EQUIPMENT

300mm LoadPort

FLIP MECHANISM, COOLING BUFFER

100mm/150mm/200mm LoadPort

OPTIONAL ROBOT MODULE

THREE-AXIS ROBOTIC ARM

FOUR-AXIS AND TWO ARMS ROBOTIC ARMS

FOUR-AXIS SINGLE-ARM ROBOTIC ARM

FIVE-AXIS AND TWO ARMS ROBOTIC ARMS

SELECT THE TRACK AXIS FOR 2–4 LOADPORT PASSAGE, COOPERATING WITH THE ROBOT

FORK SERIES