This FORTREND front - end automation module for PVD/CVD/ETCH process equipment docking features high cleanliness, modular design, and high efficiency.

It is equipped with components like a high - speed single - arm double - fork Robot and a wafer buffer mechanism to boost output.

It can be connected to the vacuum transfer chamber (VTM).

Its internal cleanliness can reach up to ISO Class 1.

It is compatible with all FOUP, FOSB, SMIF POD and Cassette that meet SEMI standards.

It has outstanding COO and COC, helping customers reduce costs and improve efficiency.

It also has customization capabilities and can be designed according to customer requirements.