Single-Arm Robot Motion Range Schematic

FWRS

300/400/500

146

8" 540

600

190.5

12" 610

680

FWRD

Z400

R190.5

Rta

Ata

F

8

MRTX

MOD

F: Fortrend

W: Wafer

P: PLP substrate

M: Mask

C: Cassette

H: Humid

R: Robot

D: Arm Qty.

S: Single arm

D: Dual-arm

A*: X(X:Number of Arms)

Axis-Z Height

240mm

300mm

400mm

500mm

Z*XXX (Customized)

LZ: Compact Lifting Height

240mm

300mm

400mm

500mm

LZ*XXX（Customized）

Dual-Z

ZD600mm

ZD700mm

ZD800mm

ZD*XXX (Customized)

Module-based

MZXXX

Drive Arm R Length

146mm

190.5mm

213mm

Eccentric ER (optional)

Special Module

Rta: Single arm FLiP

Rta2: Double Arm Up FLIP

Rta2: Double Arm Down FLIP

RtaD: Double arm double FLip

FR: wafer frame

No Options

End-effector Type

Ata: Vacuum suction

Cta: Edge gripper

Han: Clamp lift type

Ber1: Contact Bernoulli

Ber2: Non-Contact Bernoulli

Customer Customization

Fork Type

F: Original fork

No Options

Wafer Size

4″ / 6″ / 8″ / 12″

N*: Non-wafer object

Matching Options

M:

M1: Opposite-shooting Mapping Quantity 1

M2: Opposite-shooting Mapping Quantity 2

M*: Mapping Quantity 1

No Options

R:

R: Original teach pendant

No Options

TX:

T: Original Track axis

X: TRACK axis effective distance/mm

No Options

Special Customization

Have: Special Model

None: Normal Device

Standard Vacuum Suction Y-Type

Standard Vacuum Suction Linear Type

U-shaped Vacuum Fork for Takio Plate

Fork for Large Warping 1.5-5mm

Multi-hole Vacuum Suction Fork

Vacuum Suction & Friction Pad Fork

Bernoulli Fork

Contact Bernoulli Circular Type

Edge Contact Bernoulli

Contact Bernoulli Y-shaped

Edge Contactless Bernoulli

Edge Clamping Non-contact Bernoulli

Wafer-holding Fork

Gripper Type Fork

Gripper Rotating Type

Compatible Fork

Frame-type Fork

Frame Gripping Fork

Frame Clamping Fork

Frame Vacuum Suction Fork