This FORTREND Frame EFEM front - end automation module features high cleanliness, high compatibility, and a self - developed centering mechanism.

It offers a wafer loading system with options like the Frame Wafer Loadport and Frame Open Cassette Stage.

It supports 4 - to 12 - inch Frame wafers, and can be equipped with a high - precision self - developed centering device, as well as clamping or vacuum - suction - type robot hands.

It can handle both Frame Wafer and standard wafer.

Its internal cleanliness can reach up to ISO Class 1.

It is compatible with all FOUP, FOSB, SMIF POD and Cassette that meet SEMI standards.

It has outstanding COO and COC, helping customers reduce costs and improve efficiency.

It also has customization capabilities and can be designed according to customer requirements.