This FORTREND six - station standard wafer sorter features high cleanliness, compatibility and efficiency. It's mainly used for wafer transfer, sorting and merging.
It can accommodate wafers of various sizes (3 - to 12 - inch) and types, with thickness support ranging from 100μm to 1,600μm.
Its internal cleanliness can reach up to ISO Class 1.
It is compatible with all FOUP, FOSB, SMIF POD and Cassette that meet SEMI standards.
It has outstanding COO and COC, helping customers reduce costs and improve efficiency.
It also has customization capabilities and can be designed according to customer requirements.
This equipment has 45 years of semiconductor industry experience and meets SECS/GEM standards.
It has a modular design for easy and quick installation and maintenance.
It includes many safety and anti - malfunction designs to ensure normal operation.
We offer installation, on - site training, global support, and various cost - effective long - term maintenance contracts.
Rated Voltage | Phase AC 220V 50/60 Hz |
Rated Power | 3.52kW(Decide by config) |
Body material | Painted SPCC (RAL 9003) |
Comm Interface | RJ45 |
Comm protocol | ASCI/HEX/HSMS&SECS Ⅱ |
Software |
Fortrend independently developed software |
Cleanliness | Class 1 (ISO 3) |
End-effector | Vacuum Blade /Edge Grip / Bernoulli /Custom |
Uptime | ≥99% |
MTBF | ≥4000 hours |
MTTR | ≤4 hours |
MTBA | >100 hours |
MTTA | <10 hours |
MCBF | 100,000Wafers |
Wafer Breakage Rate | ≤1/1,000,000 |
OCR Accuracy Rate for Bare Wafers | ≥99.9% |
Repeatability of Positioning Accuracy | 士0.1mm |
Disclaimer: The appearance, specifications, performance descriptions, comparative data, and other information regarding the products displayed on this website are based on internal testing and experiments conducted in FORTREND’s laboratory. This information is for reference purposes only, and the final product may vary.
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